Title :
Low loss laser-written channel waveguides in porous silicon
Author :
Rossi, A.M. ; Perrone, G. ; Cappelluti, F. ; Camarchia, V. ; Boarino, Luca ; Amato, G.
Author_Institution :
Ist. Elettrotecnico Nazionale Galileo Ferraris, Torino, Italy
Abstract :
In this paper we present the fabrication and characterization of low loss buried channel waveguides in porous silicon (PS), designed to work around 1.55 μm, and obtained for the first time by direct laser writing. This novel technique, derived from the laser ablation, is a good alternative to the traditional photolithographic process. In fact, owing to the low thermal conductivity of PS, the high temperatures required for the writing are achievable with low power lasers, making the process highly efficient and possible with the standard equipment present in most laboratories
Keywords :
elemental semiconductors; laser ablation; optical fabrication; optical losses; optical waveguides; porous semiconductors; silicon; 1.55 micron; Si; buried channel waveguide; direct laser writing; fabrication; laser ablation; optical loss; porous silicon; Laboratories; Laser ablation; Optical design; Optical device fabrication; Power lasers; Silicon; Temperature; Thermal conductivity; Waveguide lasers; Writing;
Conference_Titel :
Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE
Conference_Location :
Rio Grande
Print_ISBN :
0-7803-5947-X
DOI :
10.1109/LEOS.2000.894077