Title :
A New Ionic Type Photosensitive Polyimide For Microelectronics
Author :
Asano, Masaya ; Eguchi, Masuichi ; Kusano, Kazutaka ; Niwa, Katsuhiro
Keywords :
Adhesives; Energy resolution; Image resolution; Mechanical factors; Microelectronics; Polyimides; Protection; Substrates; Thermal expansion; Thermal stresses;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN :
0-7803-1432-8
DOI :
10.1109/IEMT.1993.639754
