DocumentCode
2761288
Title
A New Ionic Type Photosensitive Polyimide For Microelectronics
Author
Asano, Masaya ; Eguchi, Masuichi ; Kusano, Kazutaka ; Niwa, Katsuhiro
fYear
1993
fDate
9-11 Jun 1993
Firstpage
213
Lastpage
216
Keywords
Adhesives; Energy resolution; Image resolution; Mechanical factors; Microelectronics; Polyimides; Protection; Substrates; Thermal expansion; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN
0-7803-1432-8
Type
conf
DOI
10.1109/IEMT.1993.639754
Filename
639754
Link To Document