Title :
Near Surface Region Of Modified Saw Substrates As A Component Of Layered Structure
Author :
Kapelewski, Jerzy ; Dukata, Andrzej
Keywords :
Adhesives; Fabrication; Frequency; Impurities; Physics; Stress; Surface acoustic waves; Surface topography; Surface treatment; Surface waves;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN :
0-7803-1432-8
DOI :
10.1109/IEMT.1993.639762
