Title :
Automation of LSI manufacturing
Author_Institution :
Mitsubishi Electr. Corp., Tokyo, Japan
Abstract :
Totally automated lines for the production of DRAMs (dynamic random-access memories) and ASICs (application-specific integrated circuits) have been constructed using special production equipment, an automated guided vehicle, and a moving robot. Also developed was an IC card to assist the interaction of an automated system and humans. As a result of the automation, cleanliness was greatly improved both locally and in the entire clean room; the number of workers decreased to less than half of that of the conventional line; defects on the wafer caused by manual handling were greatly reduced; process data showed very tight distribution about the mean; and the number of lots rejected due to misoperation by workers greatly decreased. These results brought about a high and stable yield and improved the quality of the products
Keywords :
application specific integrated circuits; automatic guided vehicles; industrial robots; integrated circuit manufacture; integrated memory circuits; large scale integration; process computer control; random-access storage; ASICs; DRAMs; IC card; LSI manufacturing; automated guided vehicle; automated lines; clean room; cleanliness; manual handling; moving robot; quality; yield; Assembly; Fabrication; Large scale integration; Manufacturing automation; Manufacturing processes; Production equipment; Production management; Productivity; Random access memory; Robotics and automation;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1989, Proceedings. Japan IEMT Symposium, Sixth IEEE/CHMT International
Conference_Location :
Nara
DOI :
10.1109/IEMTS.1989.76146
