Title :
Surface micrometrology using ultrasound
Author :
Blessing, G.V. ; Eitzen, D.G. ; Ryan, H.M. ; Slotwinski, J.A.
Author_Institution :
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
The development of ultrasonic scattering and reflection techniques for the online measurement of machined part surface features is described. A range of ultrasonic frequencies and beam dimensions was supplied to shaped and turned sample surfaces, using both scattering and profiling techniques. It is demonstrated that it is feasible for pulsed ultrasound to resolve average roughness values and discrete asperities of less than 1 μm
Keywords :
surface topography measurement; ultrasonic materials testing; average roughness values; beam dimensions; discrete asperities; machined part surface features; online measurement; profiling techniques; pulsed ultrasound; shaped sample surfaces; surface micrometrology; turned sample surfaces; ultrasonic frequencies; ultrasonic reflection techniques; ultrasonic scattering; Frequency; Manufacturing; Monitoring; Optical reflection; Pulse measurements; Rough surfaces; Scattering; Surface roughness; Surface topography; Ultrasonic imaging;
Conference_Titel :
Ultrasonics Symposium, 1990. Proceedings., IEEE 1990
Conference_Location :
Honolulu, HI
DOI :
10.1109/ULTSYM.1990.171522
