Title :
Optical interferometric probing of advanced microprocessors
Author :
Eiles, T.M. ; Wilsher, K. ; Lo, W.K. ; Xiao, G.
Author_Institution :
Intel Corp., Santa Clara, CA, USA
Abstract :
Phase-sensitive signal detection with an integrated interferometer has been applied in backside optical probing to improve waveform quality. We have used the technique on a number of microprocessors on a 0.18 μm logic process technology
Keywords :
CMOS logic circuits; integrated circuit measurement; integrated circuit testing; light interferometry; measurement by laser beam; microprocessor chips; optical signal detection; phase modulation; signal sampling; timing; waveform analysis; CMOS logic process; advanced microprocessors; backside optical probing; high-speed probing; improved waveform quality; integrated interferometer; optical interferometric probing; phase modulation; phase-sensitive signal detection; Amplitude modulation; Microprocessors; Microscopy; Optical interferometry; Optical noise; Optical polarization; Optical retarders; Phase detection; Phase modulation; Timing;
Conference_Titel :
Test Conference, 2000. Proceedings. International
Conference_Location :
Atlantic City, NJ
Print_ISBN :
0-7803-6546-1
DOI :
10.1109/TEST.2000.894194
