Title :
An left handed material on Si CMOS chip with wafer level package process
Author :
Kim, Jang-Gu ; Okada, Kenichi ; Yammouch, Tackya ; Sato, Takashi ; Masu, Kazuya
Author_Institution :
Tokyo Inst. of Technol., Yokohama
Abstract :
This paper presents a left-handed material microstrip transmission line on Si CMOS chip using wafer level package (WLP) process. The left- handed materials (LHM) of the novel structure extend from 0.01 GHz to 20 GHz, performing in much wider bandwidth than those reported so far. Composite right/left-handed material (CRLH TL) microstrip line consists of metal-insulator-metal (MIM) capacitors, microstrip transmission lines (TLs) and inductors fabricated by the wafer level package (WLP) process, and it performs as a high-pass filter. The proposed structure is more compact in size and exhibits better insertion and return loss characteristics around the design frequency. The compactness and broad left-handed operation make the proposed left-handed material be well incorporated with Si CMOS RF/Microwave applications.
Keywords :
CMOS integrated circuits; MIM devices; MMIC; UHF integrated circuits; capacitors; elemental semiconductors; high-pass filters; metamaterials; microstrip lines; microwave materials; silicon; wafer level packaging; CMOS chip; LHM; MIM capacitors; Si; WLP; composite right-left-handed material; frequency 0.01 GHz to 20 GHz; high-pass filter; metal-insulator-metal capacitors; microstrip transmission line; return loss characteristics; wafer level package process; Bandwidth; CMOS process; Inductors; MIM capacitors; Metal-insulator structures; Metamaterials; Microstrip filters; Packaging; Transmission lines; Wafer scale integration; COMPOSITE RIGHT/LEFTHANDED MATERIAL(CRLH TL); LEFT-HANDED; MATERIAL(LHM); MIM; SI CMOS; WLP;
Conference_Titel :
Microwave Conference, 2006. APMC 2006. Asia-Pacific
Conference_Location :
Yokohama
Print_ISBN :
978-4-902339-08-6
Electronic_ISBN :
978-4-902339-11-6
DOI :
10.1109/APMC.2006.4429649