Title :
Analysis of failure sources in surface-micromachined MEMS
Author :
Deb, N. ; Blanton, R.D.
Author_Institution :
Center for Electron. Design Autom., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
The effect of vertical stiction, foreign particles, and etch variation on the resonant frequency of a surface-micromachined resonator and accelerometer are presented. For each device, it is shown that misbehaviors resulting from different failure sources can overlap, exhibit dominance and combine to create behavior masking and construction. Such an analysis is essential for developing test and diagnosis methodologies for surface-micromachined MEMS
Keywords :
accelerometers; etching; fault diagnosis; finite element analysis; microactuators; micromachining; micromechanical resonators; microsensors; semiconductor device testing; stiction; surface contamination; FEA prediction; MEMS actuator; behavior masking; etch variation; fabrication process abnormality; failure sources; foreign particles; microaccelerometer; micromechanical resonator; resonant frequency; surface-micromachined MEMS; vertical stiction; Accelerometers; Circuit faults; Etching; Fabrication; Failure analysis; Microelectromechanical devices; Micromechanical devices; Sputtering; Testing; Thin film circuits;
Conference_Titel :
Test Conference, 2000. Proceedings. International
Conference_Location :
Atlantic City, NJ
Print_ISBN :
0-7803-6546-1
DOI :
10.1109/TEST.2000.894270
