Analysis of failure sources in surface-micromachined MEMS

Author

Deb, N. ; Blanton, R.D.

Author_Institution

Center for Electron. Design Autom., Carnegie Mellon Univ., Pittsburgh, PA, USA

fYear

2000

fDate

2000

Firstpage

739

Lastpage

749

Abstract

The effect of vertical stiction, foreign particles, and etch variation on the resonant frequency of a surface-micromachined resonator and accelerometer are presented. For each device, it is shown that misbehaviors resulting from different failure sources can overlap, exhibit dominance and combine to create behavior masking and construction. Such an analysis is essential for developing test and diagnosis methodologies for surface-micromachined MEMS

Keywords

accelerometers; etching; fault diagnosis; finite element analysis; microactuators; micromachining; micromechanical resonators; microsensors; semiconductor device testing; stiction; surface contamination; FEA prediction; MEMS actuator; behavior masking; etch variation; fabrication process abnormality; failure sources; foreign particles; microaccelerometer; micromechanical resonator; resonant frequency; surface-micromachined MEMS; vertical stiction; Accelerometers; Circuit faults; Etching; Fabrication; Failure analysis; Microelectromechanical devices; Micromechanical devices; Sputtering; Testing; Thin film circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Test Conference, 2000. Proceedings. International

Conference_Location

Atlantic City, NJ

ISSN

1089-3539

Print_ISBN

0-7803-6546-1

Type

conf

DOI

10.1109/TEST.2000.894270

Filename

894270