Barium strontium titanate thin film varactors on r-plane sapphire

Author

Fardin, Ernest A. ; Holland, Anthony S. ; Ghorbani, Kamran ; Simon, William K. ; Akdogan, E. Koray ; Safari, Ahmad

Author_Institution

RMIT Univ., Melbourne

fYear

2006

fDate

12-15 Dec. 2006

Firstpage

1547

Lastpage

1552

Abstract

This paper presents the microwave properties of barium strontium titanate (BST) thin films on r-plane sapphire substrates. A series of films with thickness 25-400 nm was prepared by pulsed laser deposition (PLD). Microwave properties of the films, including capacitance tunability and loss tangent, were extracted by patterning interdigitated capacitors (IDCs) on the film surface. The highest tunability of 64% was observed in the 200 nm film. These results demonstrate the possibility of integrating BST into the silicon on sapphire process.

Keywords

feature extraction; microwave circuits; thin film capacitors; varactors; barium strontium titanate; barium strontium titanate thin film varactors; interdigitated capacitors; microwave properties; pattern extraction; r-plane sapphire; sapphire process; Barium; Binary search trees; Masers; Optical pulses; Pulsed laser deposition; Strontium; Substrates; Titanium compounds; Transistors; Varactors; Ferroelectric thin films; microwave varactors; silicon on sapphire;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2006. APMC 2006. Asia-Pacific

Conference_Location

Yokohama

Print_ISBN

978-4-902339-08-6

Electronic_ISBN

978-4-902339-11-6

Type

conf

DOI

10.1109/APMC.2006.4429701

Filename

4429701