A micro-machined cantilever PSA sensor with digital wireless interface

Author

Chou, Hung-Ta ; Hwang, Rong-Zhong ; Hung, Chia-Ming ; Tseng, Chih-Wei ; Huang, Long-Sun ; Lu, Shey-Shi

Author_Institution

Nat. Taiwan Univ., Taipei

fYear

2006

fDate

12-15 Dec. 2006

Firstpage

1622

Lastpage

1625

Abstract

A reusable miniature silicon sensor for prostate-specific antigen (PSA) is implemented. A micro-machined cantilever beam is fabricated as the basis of this sensor by photo-lithography. An 8-bit successive approximation analog-to-digital converter (SAR ADC) and an on-off-keying digital wireless transmitter are integrated to enable wireless data transmission. The detectable PSA solution ranges from 0.1 mug/ml to 200 mug/ml. Wireless interface is fabricated with TSMC 0.35 urn 2P4M CMOS technology.

Keywords

CMOS integrated circuits; analogue-digital conversion; bioMEMS; biosensors; microsensors; wireless sensor networks; CMOS technology; digital wireless interface; micromachined cantilever PSA sensor; photolithography; prostate-specific antigen; reusable miniature silicon sensor; successive approximation analog-to-digital converter; wireless data transmission; Biosensors; CMOS technology; Chromium; Circuits; Gold; Optical transmitters; Prostate cancer; Silicon; Structural beams; Wireless sensor networks; analog-to-digital converter; cantilever beam; on-off-keying; position-sensitive detector; prostate-specific antigen; successive approximation;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2006. APMC 2006. Asia-Pacific

Conference_Location

Yokohama

Print_ISBN

978-4-902339-08-6

Electronic_ISBN

978-4-902339-11-6

Type

conf

DOI

10.1109/APMC.2006.4429718

Filename

4429718