Title :
Laser power monitoring using MEMS micromirror technology
Author :
Agarwal, Abhishek ; Arney, S. ; Barber, B.P. ; Kosinski, S.G. ; LeGrange, J.D. ; Raju, V.R. ; Ruel, R.
Author_Institution :
AT&T Bell Labs., Murray Hill, NJ, USA
Abstract :
We have fabricated and characterized fiberized MEMS in situ power monitor chips in which a surface-micromachined out-of-plane micromirror partially reflects the incident multimode light to an on-chip fiber tap. Reflectivity and transmittivity were measured as a function of time at various increasing incident optical power levels, and for various material systems. The first prototypes show stability to hundreds of milliwatts
Keywords :
laser variables measurement; light transmission; micro-optics; micromachining; microsensors; mirrors; monitoring; optical fibre couplers; power measurement; reflectivity; MEMS micromirror technology; fiberized MEMS in situ power monitor chips; incident multimode light; incident optical power levels; laser power monitoring; material systems; on-chip fiber tap; partial light reflection; reflectivity; stability; surface-micromachined out-of-plane micromirror; transmittivity; Fiber lasers; Micromechanical devices; Micromirrors; Monitoring; Optical materials; Power lasers; Power measurement; Reflectivity; Semiconductor device measurement; Time measurement;
Conference_Titel :
Reliability Physics Symposium Proceedings, 1999. 37th Annual. 1999 IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-5220-3
DOI :
10.1109/RELPHY.1999.761612
