Title :
Low-loss LIGA-fabricated coplanar waveguide and filter
Author :
Forman, Michael A.
Author_Institution :
Sandia Nat. Lab., Livermore
Abstract :
A low-loss LIGA-fabricated conductor- backed coplanar waveguide and filter are presented. The copper transmission lines are 517 mum thick and are fabricated directly on quartz in a uniplanar X- ray lithography process. The conductor-backed CPW achieves a measured attenuation of 0.090 dB/cm at 18 GHz with low dispersion over the bandwidth of interest. A bandpass filter is realized using the thick-metal CPW with with two shorted quarter-wave resonators, which provide a passband between 6 and 11 GHz and a loss of -1 dB at 8.5 GHz.
Keywords :
LIGA; band-pass filters; coplanar waveguides; resonators; LIGA; attenuation; bandpass filter; bandwidth 6 GHz to 11 GHz; conductor- backed coplanar waveguide; coplanar filter; copper transmission lines; frequency 18 GHz; loss -1 dB; quarter-wave resonators; size 517 mum; thick-metal CPW; uniplanar X- ray lithography; Attenuation measurement; Band pass filters; Bandwidth; Coplanar transmission lines; Coplanar waveguides; Copper; Dispersion; Lithography; Passband; Transmission line measurements; Coplanar waveguide; LIGA; bandpass filter; high power; low dispersion; low loss; thick metal;
Conference_Titel :
Microwave Conference, 2006. APMC 2006. Asia-Pacific
Conference_Location :
Yokohama
Print_ISBN :
978-4-902339-08-6
Electronic_ISBN :
978-4-902339-11-6
DOI :
10.1109/APMC.2006.4429780
