Title :
[Copyright notice]
Abstract :
The following topics are dealt with: microelectromechanical system; optical MEMS; medical MEMS; assembly; diagnostics; lab-on-a-chip; carbon nanotube; flexible substrate; power; piezos; RF MEMS; resonator; cells; molecules; fabrication technology; packaging technology; mechanical sensor; physical MEMS; biosensor; chemical microsensor; medical microsystem; microfluidic component; microfluidic system; microactuator; energy harvesting; power MEMS; nanoelectromechanical device; and nanoelectromechanical system.
Keywords :
assembling; carbon nanotubes; lab-on-a-chip; micromechanical devices; nanoelectromechanical devices; RF MEMS; assembly; biosensor; carbon nanotube; cells; chemical microsensor; diagnostics; energy harvesting; fabrication technology; flexible substrate; lab-on-a-chip; mechanical sensor; medical MEMS; medical microsystem; microactuator; microelectromechanical system; microfluidic component; microfluidic system; molecules; nanoelectromechanical device; nanoelectromechanical system; optical MEMS; packaging technology; physical MEMS; piezos; power MEMS; resonator;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734346
