A single lithography vertical NEMS switch

We demonstrate the use of torsion in nanorelays to achieve low voltages, high speeds, single lithography step construction, and a form useful for configurability and electronic design enhancements in three-dimensional integrated implementations. The combined bending and torsion of self-aligned nanopillars facilitates the first top-down fabricated vertical three terminal nanoscale relay. Experimental devices, even at 500 nm features, operate at ~10 V and μs. Scaling suggests operation down to unit volts.