A mushroom-shaped convex poly-Si structure for preventing z-directional stiction of an SOI-MEMS device

Author

Akashi, T. ; Funabashi, H. ; Nonomura, Y.

Author_Institution

Toyota Central R&D Labs., Inc., Nagakute, Japan

fYear

2011

fDate

23-27 Jan. 2011

Firstpage

201

Lastpage

204

Abstract

This paper describes a novel convex poly-Si structure capable of preventing a silicon-on-insulator micro-electromechanical- systems (SOI-MEMS) structure that is movable in the z-direction from sticking to a supporting substrate. This structure is referred to as a poly-Si mushroom-shaped structure (pSiMS) because the structure has a convex shape that resembles a pileus of a mushroom. A pSiMS with a height of 0.6 μm and a diameter of 2.8 μm was fabricated on doubly clamped and cantilever beams by the formation of a mold and by refilling the mold with poly-Si. We performed a stiction test and succeeded in preventing 2-mm-long beams from sticking by forming pSiMSs. The test results demonstrated the effectiveness of the pSiMS.

Keywords

microfabrication; micromechanical devices; silicon-on-insulator; SOI-MEMS device; Si; cantilever beams; doubly-clamped beams; mushroom-shaped convex polysilicon structure; pSiMS; silicon-on-insulator microelectromechanical systems; stiction test; z-directional stiction; Etching; Fabrication; Resists; Silicon; Silicon compounds; Structural beams; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Conference_Location

Cancun

ISSN

1084-6999

Print_ISBN

978-1-4244-9632-7

Type

conf

DOI

10.1109/MEMSYS.2011.5734396

Filename

5734396