Title :
High Frequencies Characterization of High-K Insulators and their Impact on Architectures of MIM Capacitors in Advanced Integrated Circuits
Author :
Lacrevaz, T. ; Vo, T.T. ; Piquet, J. ; Bermond, C. ; Fléchet, B. ; Defay, E. ; Thomas, M. ; Farcy, A. ; Cueto, O. ; Torres, J.
Author_Institution :
LAHC Univ. de Savoie, Le Bourget du Lac
Abstract :
High frequency characterizations of high-K dielectrics and advanced metal-insulator-metal (MIM) capacitors are presented. This work deals with the impact of process on materials permittivity and the effect of architectures and high-K materials on MIM capacitors electrical performances.
Keywords :
MIM devices; capacitors; integrated circuits; permittivity; high frequencies characterization; high-K insulators; integrated circuit; materials permittivity; metal-insulator-metal capacitor; Copper; Cutoff frequency; Electromagnetic analysis; Electromagnetic waveguides; High K dielectric materials; High-K gate dielectrics; Insulation; MIM capacitors; Metal-insulator structures; Permittivity measurement; High-K materials, complex permittivty; MIM capacitors; architectures; electrical performances; high frequencies characterization; processes; quality factor, cut-off frequency;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2006 Conference on
Conference_Location :
Perth, WA
Print_ISBN :
978-1-4244-0578-7
Electronic_ISBN :
978-1-4244-0578-7
DOI :
10.1109/COMMAD.2006.4429874
