Title :
Fabrication and properties of 3D flexible parylene-based microelectrode array with silicon tips
Author :
Wang, Renxin ; Zhao, Wei ; Wang, Wei ; Li, Zhihong
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
We have developed and characterized a novel 3D flexible parylene-based microelectrode array (MEA) with silicon tips, which combines advantages of the rigid 3d electrode and the flexible substrate. The impedance of solid 3D MEA in PBS solution is smaller than that of the planar and hollow 3D MEA. Further tests indicate that the solid 3D MEA has better penetrating performance, and retains previous structure and profile without observable damage after penetration.
Keywords :
biomedical electronics; elemental semiconductors; microelectrodes; prosthetics; silicon; substrates; 3D MEA; 3D flexible parylene-based microelectrode array; PBS solution; flexible substrate; silicon tips; Arrays; Electrodes; Fabrication; Silicon; Solids; Substrates; Three dimensional displays;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734409
