DocumentCode :
2766409
Title :
Magnetic Ni/n-Si Schottky Contact as Hydrogen Gas Sensor
Author :
Salehi, Alireza ; Nazerian, Vahdat
Author_Institution :
K.N.Toosi Univ. of Technol., Tehran
fYear :
2006
fDate :
6-8 Dec. 2006
Firstpage :
59
Lastpage :
61
Abstract :
In this paper the sensing characteristics of magnetic and non-magnetic Ni/n-Si contacts as hydrogen gas sensors are discussed. The Ni/n-Si Schottky contacts were prepared using electron beam evaporation of ferromagnetic Ni films with thickness of 50 nm onto n-type Si substrates. To improve gas sensitivity, an appropriate profile to magnetize the ferromagnetic Ni contact has been used. From forward current-voltage characteristics we have found that the magnetic Ni/n-Si contact exhibited much more sensitivity than the non-magnetic Ni/n-Si sensor in response to different concentrations of hydrogen gas. Moreover, the responsivity of the magnetic Ni/n-Si sensor was investigated towards hydrogen gas at various operating temperatures between 25degC and 230degC. An explanation has been proposed to explain how the magnetization of Ni can affect sensitivity significantly.
Keywords :
Schottky barriers; electron beam deposition; ferromagnetic materials; gas sensors; magnetic sensors; magnetic thin film devices; magnetisation; nickel; thin film sensors; vacuum deposition; Ni-Si; Si; electron beam evaporation; ferromagnetic films; forward current-voltage characteristics; gas concentration; gas sensitivity; hydrogen gas sensor; magnetic Schottky contact; magnetization; n-type-silicon substrate; temperature 25 C to 230 C; Current-voltage characteristics; Electron beams; Gas detectors; Hydrogen; Magnetic films; Magnetic sensors; Schottky barriers; Semiconductor films; Sensor phenomena and characterization; Temperature sensors; Schottky contact; gas sensitivity; magnetic Ni/n-Si sensor; magnetic profile;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2006 Conference on
Conference_Location :
Perth, WA
Print_ISBN :
978-1-4244-0578-7
Electronic_ISBN :
978-1-4244-0578-7
Type :
conf
DOI :
10.1109/COMMAD.2006.4429879
Filename :
4429879
Link To Document :
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