A systematic investigation of the critical tribological properties of a gold nanoparticle coating used for texturing micro-electromechanical systems surfaces

Author

Ansari, N. ; Hurst, K.M. ; Roberts, C.B. ; Ashurst, W.R.

Author_Institution

Auburn Univ., Auburn, AL, USA

fYear

2011

fDate

23-27 Jan. 2011

Firstpage

384

Lastpage

387

Abstract

This paper reports on a novel gold nanoparticle (AuNP) coating, which is deposited on micro-electromechanical systems (MEMS) surfaces using a gas-expanded liquid technique and characterized using atomic force microscopy (AFM), scanning electron microscopy (SEM) and several microinstruments. Surface coverage of the AuNP coating, which is determined using a resonating microinstrument; and the tribological properties including the work of adhesion, the coefficient of static friction and the rupture strength of the AuNP coating, which are determined using specific microinstruments, are reported in the paper.

Keywords

adhesion; atomic force microscopy; coatings; friction; gold; micromechanical devices; nanoparticles; scanning electron microscopy; surface texture; tribology; Au; AuNP coating rupture strength; adhesion; atomic force microscopy; gas-expanded liquid technique; gold nanoparticle coating; micro-electromechanical systems surfaces; microinstruments; scanning electron microscopy; static friction; texture; tribological property; Coatings; Micromechanical devices; Rough surfaces; Surface roughness; Surface texture; Surface topography; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Conference_Location

Cancun

ISSN

1084-6999

Print_ISBN

978-1-4244-9632-7

Type

conf

DOI

10.1109/MEMSYS.2011.5734442

Filename

5734442