Title :
A systematic investigation of the critical tribological properties of a gold nanoparticle coating used for texturing micro-electromechanical systems surfaces
Author :
Ansari, N. ; Hurst, K.M. ; Roberts, C.B. ; Ashurst, W.R.
Author_Institution :
Auburn Univ., Auburn, AL, USA
Abstract :
This paper reports on a novel gold nanoparticle (AuNP) coating, which is deposited on micro-electromechanical systems (MEMS) surfaces using a gas-expanded liquid technique and characterized using atomic force microscopy (AFM), scanning electron microscopy (SEM) and several microinstruments. Surface coverage of the AuNP coating, which is determined using a resonating microinstrument; and the tribological properties including the work of adhesion, the coefficient of static friction and the rupture strength of the AuNP coating, which are determined using specific microinstruments, are reported in the paper.
Keywords :
adhesion; atomic force microscopy; coatings; friction; gold; micromechanical devices; nanoparticles; scanning electron microscopy; surface texture; tribology; Au; AuNP coating rupture strength; adhesion; atomic force microscopy; gas-expanded liquid technique; gold nanoparticle coating; micro-electromechanical systems surfaces; microinstruments; scanning electron microscopy; static friction; texture; tribological property; Coatings; Micromechanical devices; Rough surfaces; Surface roughness; Surface texture; Surface topography; Surface treatment;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734442
