Corrosion resistance consolidation of a diaphragm type vacuum sensor

This paper describes the corrosion resistance consolidation of a diaphragm type vacuum sensor using a high corrosion resistance material. Initially, we had fabricated a vacuum sensor using a Ru based thin film amorphous alloy, whose high corrosion resistance was confirmed in wet tests. In the high corrosion gas tests, however, the sensor resists NF₃ and COF₂ gases but does not resist ClF₃ gas. Therefore, we searched for new Ni based amorphous alloys which can also resist ClF₃ using a combinatorial search based on a MEMS process. We were able to fabricate new sensors using Ni₅₆Nb₃₃Ti₁₁ and Ni₄₉Nb₃₅Ti₁₆ amorphous alloys which were shown to resist all three mentioned gases.