Adaptive MOEMS for Dynamic Beam Focusing

Micro-opto-electro-mechanical systems (MOEMS) are finding increased uses in instrumentation and many imaging applications. The required complex optical manipulations of laser beams use expensive, sub-optimal and inaccurate optical components (lenses, mirrors, spectral filters, etc.). MOEMS components can be introduced instead of (or in addition to) these optical path elements. Such MEMS devices can significantly improve the overall performance of these instruments. We propose MOEMS elements arrays to act as adaptive and corrective optics. Alternatively, the MOEMS elements can dynamically vary the optical path structure. As a proof of concept, a simple 2D array of micro-mirrors that approximate a concave mirror is investigated. CoventorWare 3D modeler was used for the design and simulations. The prototype implementation was done using PolyMUMPs. This dynamic focusing device changes the focal point of an incident laser beam with low actuation voltage and tuning voltages.