Title :
Optical Performance of a MEMS Tunable IR Microspectrometer
Author :
Keating, A.J. ; Antoszewski, J. ; Silva, K. K M B D ; Winchester, K.J. ; Nguyen, T. ; Dell, J.M. ; Musca, C.A. ; Faraone, L.
Author_Institution :
Univ. of Western Australia, Crawley
Abstract :
The fabrication issues and optical performance of monolithically integrated microspectrometers are presented. The primary technical challenge in achieving the integration of a MEMS Fabry-Perot filter with the HgxCd1-xTe detector is to keep the processing temperature less than 125 degC. The results show successful device operation with tuning over 440 nm across the SWIR (1.6-2.5 mum) band, lineswidths of 55 nm, and switching times of 60 mus.
Keywords :
infrared spectrometers; micromechanical devices; MEMS Fabry-Perot filter; MEMS tunable IR microspectrometer; device operation; microelectromechanical system; micromechanical device; monolithically integrated microspectrometer; optical performance; Fabry-Perot; Infrared detectors; Micromechanical devices; Mirrors; Optical arrays; Optical filters; Pixel; Polyimides; Sensor arrays; Temperature; IR detector; Microelectromechanical systems;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2006 Conference on
Conference_Location :
Perth, WA
Print_ISBN :
978-1-4244-0578-7
Electronic_ISBN :
978-1-4244-0578-7
DOI :
10.1109/COMMAD.2006.4429921
