Title :
Friction, adhesion, and wear properties of PDMS coatings in MEMS devices
Author :
Penskiy, Ivan ; Gerratt, Aaron P. ; Bergbreiter, Sarah
Author_Institution :
Mech. Eng., Univ. of Maryland, College Park, MD, USA
Abstract :
This paper demonstrates the first tests of friction, adhesion, and wear properties of thin poly(dimethylsiloxane) (PDMS) films deposited on the sidewalls of silicon-on-insulator structures. The curves of coefficient of friction versus normal pressure were obtained for PDMS-on-PDMS, PDMS-on-silicon, and silicon-on-silicon sidewall interfaces. Tests were also completed to evaluate the effects of aging and wear on the properties of PDMS. The results of friction tests showed that the coefficient of friction follows the Hertz contact model, and in the wear tests PDMS showed high resistance to abrasion.
Keywords :
adhesion; friction; materials testing; micromechanical devices; silicon-on-insulator; wear; Hertz contact model; MEMS devices; PDMS coatings; adhesion; coefficient of friction; silicon-on-insulator structures; wear properties; Actuators; Adhesives; Force; Friction; Micromechanical devices; Resonant frequency; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734456
