Title :
Gamma irradiation effects on resistance of surface micromachined polycrystalline silicon beams in MEMS
Author :
Wang, Lei ; Tang, Jieying ; Song, Jing ; Huang, Qing-An
Author_Institution :
Key Lab. of MEMS of the Minist. of Educ., Southeast Univ., Nanjing, China
Abstract :
This paper reports gamma irradiation effects on the resistance of polycrystalline silicon beams in MEMS. Co60 irradiation test was performed to reveal mechanisms underlying radiation effects. Changes of the resistances have been measured by Semiconductor Characterization Instruments. The mechanisms of gamma irradiation effects on the resistance of polycrystalline silicon were discussed in detail. Resonant frequencies were measured by Laser Doppler Vibrometer (LDV) to validate the mechanism of gamma irradiation effect on resistance.
Keywords :
cobalt; gamma-ray effects; micromachining; micromechanical devices; MEMS; Si; gamma irradiation effects; laser Doppler vibrometer; polycrystalline silicon beam resistance; semiconductor characterization instruments; surface micromachining; Electrical resistance measurement; Laser beams; Micromechanical devices; Radiation effects; Resistance; Silicon; Strain;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734457
