DocumentCode
2767275
Title
Gamma irradiation effects on resistance of surface micromachined polycrystalline silicon beams in MEMS
Author
Wang, Lei ; Tang, Jieying ; Song, Jing ; Huang, Qing-An
Author_Institution
Key Lab. of MEMS of the Minist. of Educ., Southeast Univ., Nanjing, China
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
445
Lastpage
448
Abstract
This paper reports gamma irradiation effects on the resistance of polycrystalline silicon beams in MEMS. Co60 irradiation test was performed to reveal mechanisms underlying radiation effects. Changes of the resistances have been measured by Semiconductor Characterization Instruments. The mechanisms of gamma irradiation effects on the resistance of polycrystalline silicon were discussed in detail. Resonant frequencies were measured by Laser Doppler Vibrometer (LDV) to validate the mechanism of gamma irradiation effect on resistance.
Keywords
cobalt; gamma-ray effects; micromachining; micromechanical devices; MEMS; Si; gamma irradiation effects; laser Doppler vibrometer; polycrystalline silicon beam resistance; semiconductor characterization instruments; surface micromachining; Electrical resistance measurement; Laser beams; Micromechanical devices; Radiation effects; Resistance; Silicon; Strain;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734457
Filename
5734457
Link To Document