DocumentCode :
2767373
Title :
Microscopic measurement of strain distribution on mems device using three dimensional orientation microscope
Author :
Yoshiki, K. ; Yoshida, S. ; Namazu, T. ; Araki, N. ; Hashimoto, M. ; Kurihara, M. ; Hashimoto, N. ; Inoue, S.
Author_Institution :
Dept. of Mech. & Syst. Eng., Univ. of Hyogo, Kamigori, Japan
fYear :
2011
fDate :
23-27 Jan. 2011
Firstpage :
461
Lastpage :
464
Abstract :
In this study we describe a novel system for measuring the distribution of inhomogeneous mechanical properties of microelectromechanical system (MEMS) devices. Such inhomogeneous properties are important because they can decrease the reliability of MEMS devices. Our technique involves measuring the variation in the relative position and angle between single molecule markers sprayed on a MEMS device, which indicates the amount of local deformation. The distribution of the deformation on the surface of a MEMS device is calculated from local displacements measured using the system. To simultaneously measure the three-dimensional (3D) position and orientation of the markers, we developed a 3D orientation measurement system that consists of an epifluorescence microscope and a polarization mode converter (PMC). We also detected the 3D displacement and orientation of the torsion bar in a MEMS mirror device.
Keywords :
displacement measurement; mechanical properties; strain measurement; torsion; 3D orientation measurement system; MEMS device; epifluorescence microscope; inhomogeneous mechanical properties; microscopic measurement; polarization mode converter; strain distribution; three dimensional orientation microscope; torsion bar; Fluorescence; Micromechanical devices; Microscopy; Mirrors; Optical filters; Position measurement; Three dimensional displays;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
ISSN :
1084-6999
Print_ISBN :
978-1-4244-9632-7
Type :
conf
DOI :
10.1109/MEMSYS.2011.5734461
Filename :
5734461
Link To Document :
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