Title :
Near-contact damping model and dynamic response of μ-beams under high-g loads
Author :
Parkos, Devon ; Raghunathan, Nithin ; Ayyaswamy, Venkattraman ; Alexeenko, Alina ; Peroulis, Dimitrios
Author_Institution :
Sch. of Aeronaut. & Astronaut., Purdue Univ., West Lafayette, IN, USA
Abstract :
This paper presents the first near-contact aerodynamic damping model based on rarefied flow modeling for use in dynamic simulations of large-displacement motion and contacting behavior of microbeams. The damping model is constructed based on high-fidelity simulations of rarefied gas flow around microbeams based on the Boltzmann kinetic equation with the Ellipsoidal Statistical Bhatnagar-Gross-Krook (ES-BGK) collision relaxation model. The predictions using the new model and previously published models are compared with experimentally measured responses of silicon microbeams under a high-g dynamic load. The new model is validated by measuring the near-contact behavior of silicon microbeams under loads up to 52,500 g and with ramping rates up to 2,750 g/μs. The model and experiments were found to be in close agreement with a maximum variation of less than 13.1%.
Keywords :
Boltzmann equation; aerodynamics; damping; elemental semiconductors; rarefied fluid dynamics; silicon; Bhatnagar-Gross-Krook collision relaxation; Boltzmann kinetic equation; Si; displacement motion; dynamic response; high-g dynamic load; near-contact aerodynamic damping; rarefied gas flow; silicon microbeams; Acceleration; Aerodynamics; Damping; Equations; Load modeling; Mathematical model; Predictive models;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734462