DocumentCode
2767606
Title
6.4 GHz acoustic sensor for in-situ monitoring of AFM tip wear
Author
Cheng, Tiffany J. ; Han, Jun Hyun ; Ziwisky, Michael ; Lee, Chung Hoon ; Bhave, Sunil A.
Author_Institution
Cornell Univ., Ithaca, NY, USA
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
521
Lastpage
524
Abstract
This paper demonstrates an acoustic sensor that can resolve atomic force microscopy (AFM) tip blunting with a frequency sensitivity of 0.007%. The AFM tip is fabricated on a thin film piezoelectric aluminum nitride (AlN) membrane that is excited as a film bulk acoustic resonator (FBAR). We demonstrate that cutting 0.98 μm off of the tip apex results in a resonance frequency change of 0.4MHz at 6.387GHz. This work demonstrates the potential for in-situ monitoring of AFM tip wear.
Keywords
acoustic microwave devices; acoustic resonators; acoustic transducers; aluminium compounds; atomic force microscopy; bulk acoustic wave devices; piezoelectric transducers; AFM tip wear; AlN; acoustic sensor; atomic force microscopy; bulk acoustic resonator; frequency 6.4 GHz; frequency sensitivity; in-situ monitoring; piezoelectric aluminum nitride membrane; thin film; tip blunting; Acoustics; Biomembranes; Electrodes; Frequency measurement; Glass; Resonant frequency; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734476
Filename
5734476
Link To Document