Title :
Low power 3-axis Lorentz force navigation magnetometer
Author :
Thompson, M.J. ; Li, M. ; Horsley, D.A.
Author_Institution :
Univ. of California, Davis, CA, USA
Abstract :
Demonstrated here is a MEMS magnetometer fabricated with the ST Microelectronics THELMA process that uses a single MEMS structure to detect magnetic flux in two axes. The device is comprised of a single Lorentz force actuator where the resulting shuttle motion is detected in two axes using differential in-plane capacitive sensing electrodes and a single-ended out-of-plane electrode. Three axis magnetic flux sensing is achieved using two perpendicular structures on the same die. The device is intended for electronic compass navigation applications and using a total of 300 μW of drive power has a 3-axis angular resolution of 0.8 degrees/rt-Hz in California, USA.
Keywords :
magnetic flux; magnetometers; micromechanical devices; Lorentz force actuator; MEMS magnetometer; MEMS structure; ST Microelectronics THELMA process; differential in-plane capacitive sensing electrode; electronic compass navigation application; magnetic flux sensing; power 3-axis Lorentz force navigation magnetometer; shuttle motion; single-ended out-of-plane electrode; Frequency measurement; Magnetic field measurement; Magnetic fields; Magnetic flux; Magnetometers; Micromechanical devices; Sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734494
