Title :
Microshutters for MEMS-based time-of-flight measurements in space
Author :
Brinkfeldt, K. ; Enoksson, P. ; Wieser, M. ; Barabash, S. ; Emanuelsson, M.
Author_Institution :
Swerea IVF, Mölndal, Sweden
Abstract :
This paper reports on the fabrication, integration and first operation of a mechanical microshutter in a time-off-light (TOF) based ion detector in space. The microshutter is fabricated from a silicon on insulator (SOI) wafer and operated in a resonance mode, 306 kHz. Open time of the shutter is 100 ns. The microshutters are integrated in the PRIMA instrument, which is part of the payload on the Swedish PRISMA mission. PRISMA was successfully launched into low Earth orbit on June 15, 2010.
Keywords :
aerospace instrumentation; microfabrication; silicon-on-insulator; MEMS-based time-of-flight measurements; ion detector; microshutters; silicon on insulator wafer; Aerospace electronics; Atmospheric measurements; Extraterrestrial measurements; Instruments; Micromechanical devices; Particle measurements; Resonant frequency;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734495
