DocumentCode :
2768023
Title :
Microshutters for MEMS-based time-of-flight measurements in space
Author :
Brinkfeldt, K. ; Enoksson, P. ; Wieser, M. ; Barabash, S. ; Emanuelsson, M.
Author_Institution :
Swerea IVF, Mölndal, Sweden
fYear :
2011
fDate :
23-27 Jan. 2011
Firstpage :
597
Lastpage :
600
Abstract :
This paper reports on the fabrication, integration and first operation of a mechanical microshutter in a time-off-light (TOF) based ion detector in space. The microshutter is fabricated from a silicon on insulator (SOI) wafer and operated in a resonance mode, 306 kHz. Open time of the shutter is 100 ns. The microshutters are integrated in the PRIMA instrument, which is part of the payload on the Swedish PRISMA mission. PRISMA was successfully launched into low Earth orbit on June 15, 2010.
Keywords :
aerospace instrumentation; microfabrication; silicon-on-insulator; MEMS-based time-of-flight measurements; ion detector; microshutters; silicon on insulator wafer; Aerospace electronics; Atmospheric measurements; Extraterrestrial measurements; Instruments; Micromechanical devices; Particle measurements; Resonant frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
ISSN :
1084-6999
Print_ISBN :
978-1-4244-9632-7
Type :
conf
DOI :
10.1109/MEMSYS.2011.5734495
Filename :
5734495
Link To Document :
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