DocumentCode
2768023
Title
Microshutters for MEMS-based time-of-flight measurements in space
Author
Brinkfeldt, K. ; Enoksson, P. ; Wieser, M. ; Barabash, S. ; Emanuelsson, M.
Author_Institution
Swerea IVF, Mölndal, Sweden
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
597
Lastpage
600
Abstract
This paper reports on the fabrication, integration and first operation of a mechanical microshutter in a time-off-light (TOF) based ion detector in space. The microshutter is fabricated from a silicon on insulator (SOI) wafer and operated in a resonance mode, 306 kHz. Open time of the shutter is 100 ns. The microshutters are integrated in the PRIMA instrument, which is part of the payload on the Swedish PRISMA mission. PRISMA was successfully launched into low Earth orbit on June 15, 2010.
Keywords
aerospace instrumentation; microfabrication; silicon-on-insulator; MEMS-based time-of-flight measurements; ion detector; microshutters; silicon on insulator wafer; Aerospace electronics; Atmospheric measurements; Extraterrestrial measurements; Instruments; Micromechanical devices; Particle measurements; Resonant frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734495
Filename
5734495
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