Title :
Novel concept for a MEMS microphone with dual channels for an ultrawide dynamic range
Author :
Kasai, Takashi ; Sato, Shobu ; Conti, Sebastiano ; Padovani, Igino ; David, Fillippo ; Uchida, Yuki ; Takahashi, Toshiyuki ; Nishio, Hidetoshi
Author_Institution :
Micro Device Div., OMRON Corp., Yasu, Japan
Abstract :
We develop a novel MEMS microphone with a wide dynamic range. The microphone has two channels and consists of two condensers, a single diaphragm and a backplate. Each channel has a different role. The Normal channel has higher sensitivity and an intermediate dynamic range, whereas the High channel has lower sensitivity and a higher dynamic range. By switching the two channels to correspond to sound pressure levels, the device can act as a single-channel microphone in digital signal processors.
Keywords :
micromechanical devices; microphones; MEMS microphone; backplate; condenser; diaphragm; digital signal processor; dual channel; single-channel microphone; sound pressure level; ultrawide dynamic range; Dynamic range; Frequency response; Micromechanical devices; Microphones; Sensitivity; Shape; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734497
