Piezoresistivity characterization of silicon nanowires using a MEMS device

This paper presents a MEMS device for simultaneous mechanical and electrical characterization of individual nanowires. The device consists of an electrostatic actuator and two capacitive sensors, enabling it to acquire all mechanical measurement data (force and displacement) electronically without relying on electron microscopy imaging. Electrical insulation within the suspended structures of the device enables two-point probe measurements of nanowires. A nanomanipulation procedure is developed to pick up a nanowire from its growth substrate and place it onto the MEMS device inside a scanning electron microscope. Piezoresistivity characterization of silicon nanowires is demonstrated.