Title :
Unraveling the viscosity-mediated coupling effect in biomimetic hair sensor arrays
Author :
Jaganatharaja, R.K. ; Droogendijk, H. ; Vats, S. ; Hagedoorn, B. ; Bruinink, C.M. ; Krijnen, G.
Author_Institution :
Univ. of Twente, Enschede, Netherlands
Abstract :
A dedicated microfabricated chip consisting of artificial hair sensors was realized and used to controllably and reliably investigate viscous coupling between the hair sensors. The experimental results confirm the presence of coupling effects between hair sensors when placed too close to each other. The results present significant insights in optimal array arrangements for high spatial resolution by preservation of the hair-sensors uncoupled (individual) responses.
Keywords :
biomimetics; microsensors; sensor arrays; artificial hair sensor; biomimetic hair sensor array; dedicated microfabricated chip; viscosity-mediated coupling effect; Biomembranes; Couplings; Hair; Measurement by laser beam; Micromechanical devices; Semiconductor device measurement; Sensor arrays;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734509
