Title :
ALD-metal uncooled bolometer
Author :
Yoneoka, S. ; Liger, M. ; Yama, G. ; Schuster, R. ; Purkl, F. ; Provine, J. ; Prinz, F.B. ; Howe, R.T. ; Kenny, T.W.
Author_Institution :
Stanford Univ., Stanford, CA, USA
Abstract :
This paper presents an uncooled infrared bolometer using a metal thin film that is formed by atomic layer deposition (ALD). Nanometer-thick freestanding layers enabled by ALD have the potential to improve the performance of bolometers with achieving low thermal conductance and near optimal optical properties. The fabrication and characterization of the first implementation are described as well as the electrical properties of ALD platinum films.
Keywords :
atomic layer deposition; bolometers; infrared detectors; platinum; thin films; ALD platinum films; ALD-metal uncooled bolometer; Pt; atomic layer deposition; metal thin film; nanometer-thick freestanding layers; near optimal optical property; thermal conductance; uncooled infrared bolometer; Absorption; Aluminum oxide; Bolometers; Films; Noise; Resistance; Temperature measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734515
