Title :
Fabrication and characterization of silicon micro mirror with CNT hinge
Author :
Tung, B.T. ; Dau, V.T. ; Dao, D.V. ; Yamada, T. ; Hata, K. ; Sugiyama, S.
Author_Institution :
Ritsumeikan Univ., Kusatsu, Japan
Abstract :
This paper reports the fabrication and characterization results of a silicon micro mirror fabricated by integrated of top-down fabrication of CNTs thin film and conventional micromachining. The silicon mirror is suspended by CNT hinge and actuated by using electrostatic force through angular vertical comb system. The performance of the mirror had been characterized. Thanks to the excellent mechanical properties of CNTs, the mirror could be driven by low voltage, i.e. less than 5 V, and response frequency up to 500 Hz.
Keywords :
carbon nanotubes; elemental semiconductors; micro-optomechanical devices; micromachining; micromirrors; nanophotonics; optical fabrication; silicon; C; CNT hinge; CNT thin film; Si; angular vertical comb system; electrostatic force; micromachining; micromirror fabrication; top-down fabrication; Carbon nanotubes; Fasteners; Films; Fingers; Micromechanical devices; Mirrors; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734518
