Title :
Microfabrication and thermal behavior of miniature cesium-vapor cells for atomic clock operations
Author :
Hasegawa, M. ; Chutani, R.K. ; Gorecki, C. ; Boudot, R. ; Dziuban, P. ; Galliou, S. ; Passilly, N. ; Giordano, V. ; Jornod, A.
Author_Institution :
FEMTO-ST (CNRS UMR 6174/UFC/ENSMM/UTBM), UFR Sci. et Tech., Besançon, France
Abstract :
We report on the microfabrication and packaging of Cs-vapor cells filled with Ne or Ar for micro atomic clocks (MACs) based on the coherent population trapping (CPT). We present a two-step anodic bonding process to control the cell atmosphere for long-term operation of MACs. Furthermore, the results of thermal analysis of a cell embedded in the physical package are shown in order to discuss the optimal design of the package for the thermal management of the MAC.
Keywords :
argon; atomic clocks; bonding processes; caesium; ceramic packaging; microfabrication; micromechanical devices; neon; thermal analysis; thermal management (packaging); Cs-Ne-Ar; cell atmosphere; coherent population trapping; long-term operation; low temperature co-fired ceramics technology; micro atomic clocks; microfabrication; miniature cesium-vapor cells; packaging; physical package; thermal analysis; thermal behavior; thermal management; two-step anodic bonding; Aging; Atomic clocks; Bonding; Glass; Optical buffering; Silicon; Temperature sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734524
