Title :
A high-performance, temperature-stable, continuously tuned MEMS capacitor
Author :
Shim, Yonghyun ; Wu, Zhengzheng ; Rais-Zadeh, Mina
Author_Institution :
Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
This paper reports on a continuously tunable MEMS capacitor with a wide tuning range of 5:1, high quality factor of better than 100 (at 1 GHz) at each tuned state, and self-resonance frequency of more than 13.5 GHz. The temperature stability of the capacitance in the temperature range of -50°C to 60°C is better than 7%, which is one of the best reported for continuously tuned capacitors. The maximum tuning speed of the capacitor is measured to be better than 40 μsec.
Keywords :
capacitors; micromechanical devices; capacitance temperature stability; continously tuned MEMS capacitor; continuously tunable MEMS capacitor; frequency 1 GHz; self-resonance frequency; temperature -50 degC to 60 degC; temperature-stable MEMS capacitor; Biomembranes; Capacitance; Capacitors; Strain; Stress; Temperature measurement; Tuning;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734534
