DocumentCode :
2768917
Title :
Quasi-linear frequency tuning for CMOS-MEMS resonators
Author :
Chen, Wen-Chien ; Fang, Weileun ; Li, Sheng-Shian
Author_Institution :
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear :
2011
fDate :
23-27 Jan. 2011
Firstpage :
784
Lastpage :
787
Abstract :
A voltage-dependent quasi-linear frequency tuning mechanism with zero dc power consumption for CMOS-MEMS resonators has been demonstrated with total tuning range of 5,000 ppm and sensitivity of 83.3 ppm/V at 11.5 MHz. Such frequency tuning is realized by a combination of “nonlinear” voltage-controlled electrode-to-resonator gap modulation and electrical stiffness of capacitive transduction to effect a desirable (i.e., linear) frequency dependence versus modulated dc voltage for temperature compensation of capacitive resonators which often exhibit a negative linear temperature coefficient of frequency (TCf). To alleviate inferior temperature coefficients of Young´s Modulus (TCE´s) of CMOS metal materials, a composite metal-SiO2 resonator is utilized with TCf 6X better than that of mere-metal structures, allowing the proposed frequency tuning to compensate resonator frequencies over temperature range of 80°C. This tuning capability has potential to benefit low power temperature compensation targeted for timing reference and RF synthesizing applications.
Keywords :
CMOS integrated circuits; Young´s modulus; circuit tuning; compensation; micromechanical resonators; silicon compounds; CMOS metal materials; CMOS-MEMS resonators; RF synthesis; SiO2; Young´s modulus; capacitive resonators; capacitive transduction; electrical stiffness; frequency 11.5 MHz; low power temperature compensation; mere-metal structures; negative linear temperature coefficient of frequency; nonlinear voltage-controlled electrode-to-resonator gap modulation; resonator frequency compensation; temperature 80 degC; timing reference; voltage-dependent quasilinear frequency tuning mechanism; zero DC power consumption; Electrodes; Frequency measurement; Frequency modulation; Resonant frequency; Temperature measurement; Thermal stability; Tuning;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
ISSN :
1084-6999
Print_ISBN :
978-1-4244-9632-7
Type :
conf
DOI :
10.1109/MEMSYS.2011.5734542
Filename :
5734542
Link To Document :
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