Title :
A low-mass high-speed µGC separation column with built-in fluidic chip-to-chip interconnects
Author :
Beach, K.T.M. ; Reidy, S.M. ; Gordenker, R.J.M. ; Wise, K.D.
Author_Institution :
Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
This paper reports a low-mass high-speed separation column with built in fluidic chip-to-chip interconnects for a micro gas chromatograph. The 25cm-long suspended column has been successfully coated, and separations have been obtained. The column can be heated to 100°C with 200mW in air and only 80mW in vacuum. The corresponding thermal time constants are 1.2sec and 2.5sec, respectively. Built-in heated interconnects eliminate cold-spots from long and difficult to heat capillary tubes, and plug directly into the preconcentrator and chemi-resistive detector chips, miniaturizing the fluidic analysis path to a size compatible with eventual use in devices such as cellular phones.
Keywords :
chromatography; integrated circuit interconnections; microfluidics; built-in fluidic chip-to-chip interconnect; built-in heated interconnect; cellular phone; chemi-resistive detector chip; fluidic analysis; heat capillary tubes; low-mass high-speed separation column; microgas chromatograph; power 200 mW; power 80 mW; size 25 cm; temperature 100 degC; thermal time constants; time 1.2 s; time 2.5 s; Boron; Coatings; Detectors; Electron tubes; Heating; Silicon; Stress;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734549
