DocumentCode
2769048
Title
A MEMS based gravimetric resonator for mass sensing applications
Author
Bayraktar, Ekrem ; Eroglu, Deniz ; Ciftlik, Ata Tuna ; Kulah, Haluk
Author_Institution
Middle East Tech. Univ., Ankara, Turkey
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
817
Lastpage
820
Abstract
This paper presents the design and implementation of a resonator-type high-resolution gravimetric sensor, which allows detection in liquid media without severe degradation of the quality factor and the resolution. The proposed system eliminates the drawbacks of traditional cantilever-based detectors by lateral motion of the mechanical structure, which significantly decreases squeeze-film damping. It has been experimentally verified that the system is capable of achieving 5.91 fg/Hz mass sensitivity by measuring the mass of a single 3 μm diameter polystyrene bead bound on the proof mass surface.
Keywords
micromechanical resonators; microsensors; MEMS based gravimetric resonator; lateral motion; liquid media; mass sensing applications; mechanical structure; quality factor; resonator-type high-resolution gravimetric sensor; size 3 mum; traditional cantilever-based detectors; Fabrication; Microchannel; Optical resonators; Q factor; Resonant frequency; Sensitivity; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734550
Filename
5734550
Link To Document