Title :
A MEMS based gravimetric resonator for mass sensing applications
Author :
Bayraktar, Ekrem ; Eroglu, Deniz ; Ciftlik, Ata Tuna ; Kulah, Haluk
Author_Institution :
Middle East Tech. Univ., Ankara, Turkey
Abstract :
This paper presents the design and implementation of a resonator-type high-resolution gravimetric sensor, which allows detection in liquid media without severe degradation of the quality factor and the resolution. The proposed system eliminates the drawbacks of traditional cantilever-based detectors by lateral motion of the mechanical structure, which significantly decreases squeeze-film damping. It has been experimentally verified that the system is capable of achieving 5.91 fg/Hz mass sensitivity by measuring the mass of a single 3 μm diameter polystyrene bead bound on the proof mass surface.
Keywords :
micromechanical resonators; microsensors; MEMS based gravimetric resonator; lateral motion; liquid media; mass sensing applications; mechanical structure; quality factor; resonator-type high-resolution gravimetric sensor; size 3 mum; traditional cantilever-based detectors; Fabrication; Microchannel; Optical resonators; Q factor; Resonant frequency; Sensitivity; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734550
