DocumentCode :
2769149
Title :
An electrochemical-cantilever platform for hybrid sensing applications
Author :
Fischer, Lee MacKenzie ; Dohn, Soren ; Boisen, Anja ; Tenje, Maria
Author_Institution :
Dept. of Micro- & Nanotechnol., Tech. Univ. of Denmark, Lyngby, Denmark
fYear :
2011
fDate :
23-27 Jan. 2011
Firstpage :
833
Lastpage :
836
Abstract :
This work presents a fully-functional, microfabricated electrochemical-cantilever hybrid platform with flow control. A new cantilever chip format is designed, fabricated, and mounted in a custom polymer flow cell. Issues such as leakage and optical/electrical access are addressed, and combined mechanical and electrochemical performance is investigated. Lastly, a cantilever is “defunctionalized” in situ to create a reference cantilever for differential measurements in detection of Cu2+ ions at concentrations of 10 μM and 100 nM.
Keywords :
cantilevers; electrochemical analysis; flow control; microfabrication; micromechanical devices; cantilever chip format; custom polymer flow cell; differential measurements; electrochemical-cantilever platform; flow control; hybrid sensing applications; reference cantilever; Copper; Electric potential; Electrodes; Ions; Sensors; Stress; Stress measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
ISSN :
1084-6999
Print_ISBN :
978-1-4244-9632-7
Type :
conf
DOI :
10.1109/MEMSYS.2011.5734554
Filename :
5734554
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2769149
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