• DocumentCode
    2769149
  • Title

    An electrochemical-cantilever platform for hybrid sensing applications

  • Author

    Fischer, Lee MacKenzie ; Dohn, Soren ; Boisen, Anja ; Tenje, Maria

  • Author_Institution
    Dept. of Micro- & Nanotechnol., Tech. Univ. of Denmark, Lyngby, Denmark
  • fYear
    2011
  • fDate
    23-27 Jan. 2011
  • Firstpage
    833
  • Lastpage
    836
  • Abstract
    This work presents a fully-functional, microfabricated electrochemical-cantilever hybrid platform with flow control. A new cantilever chip format is designed, fabricated, and mounted in a custom polymer flow cell. Issues such as leakage and optical/electrical access are addressed, and combined mechanical and electrochemical performance is investigated. Lastly, a cantilever is “defunctionalized” in situ to create a reference cantilever for differential measurements in detection of Cu2+ ions at concentrations of 10 μM and 100 nM.
  • Keywords
    cantilevers; electrochemical analysis; flow control; microfabrication; micromechanical devices; cantilever chip format; custom polymer flow cell; differential measurements; electrochemical-cantilever platform; flow control; hybrid sensing applications; reference cantilever; Copper; Electric potential; Electrodes; Ions; Sensors; Stress; Stress measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
  • Conference_Location
    Cancun
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-9632-7
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2011.5734554
  • Filename
    5734554
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2769149