Title :
Application of μ-analysis and synthesis to follow-up control of a profile measuring system
Author :
Takahashi, Minoru ; Kamoshita, Mikio ; Fujita, Masayuki
Author_Institution :
Res. & Dev. Group, Ricoh Co. Ltd., Yokohama, Japan
Abstract :
This paper deals with designing a follow-up control system of a profile measuring system using complex μ-synthesis and mixed μ-analysis. First for the coarse actuator, the complex μ-based control which is effective integration of H∞ control and complex μ-analysis is designed. Then the interconnection structure that includes above the system of the coarse actuator, the designed controller and the fine actuator is derived. Next a robust μ controller of the follow-up control system based on the complex μ-synthesis and complex μ-analysis is designed. Finally the proposed interconnection structure is evaluated by employing the mixed μ. Robustness and performance of the designed μ controller is verified by experiments
Keywords :
H∞ control; actuators; control system analysis; control system synthesis; measurement by laser beam; measurement systems; physical instrumentation control; robust control; singular value decomposition; surface topography measurement; H∞ control; coarse actuator; complex μ-analysis; complex μ-based control; complex μ-synthesis; follow-up control system design; interconnection structure; mixed μ-analysis; profile measuring system; robust μ controller; Actuators; Control system synthesis; Control systems; Electronic mail; Motion control; Motion measurement; Optical interconnections; Performance evaluation; Probes; Robust control;
Conference_Titel :
Decision and Control, 1998. Proceedings of the 37th IEEE Conference on
Conference_Location :
Tampa, FL
Print_ISBN :
0-7803-4394-8
DOI :
10.1109/CDC.1998.762084
