Title :
Integrated total-NOx-evaluation-chip for simultaneous conversion and detection of NOx in air
Author :
Yoon, S.-I. ; Ahn, H.-R. ; Yoon, J. ; Song, S. ; Kim, Y.-J.
Author_Institution :
Sch. of Mech. Eng., Yonsei Univ., Seoul, South Korea
Abstract :
An integrated Total-NOx-Evaluation-Chip (TNEC) is being proposed for real-time and point-of-interest evaluation of total NOx in air. It consists of a Micro-Electric-NOx-Converter (μENC) and a Thermoelectric-Gas-Sensor(TGS). In the μENC, the NOx is treated with a corona-discharge. Then, in the TGS, the treated NOx is detected by using a catalytic reaction and a thermoelectric effect. The fabricated TNEC electrically converted NOx mixture from various mixing-rates to a fixed-mixing-rate of about 25%, and detected it with the sensitivity of 4.65×10-2 μV/ppm.
Keywords :
air pollution; catalysis; corona; gas sensors; microsensors; nitrogen compounds; thermoelectric conversion; NOx; catalytic reaction; corona-discharge; fabricated TNEC; fixed-mixing-rate; integrated total-NOx-evaluation-chip; microelectric-NOx-converter; point-of-interest evaluation; real-time evaluation; thermoelectric effect; thermoelectric-gas-sensor; Corona; Discharges; Gas detectors; Inductors; Junctions; Substrates;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734570
