Title :
Novel type of microcantielver biosesor resonating at the interface between liquid and air
Author :
Park, J. ; Nishida, S. ; Kawakatsu, H. ; Fujita, H.
Author_Institution :
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo, Japan
Abstract :
We developed a new type of a microcantilever biosensor resonating at the interface between air and liquid. The cantilever sensor has advantages in high signal-to-noise ratio (SNR) and high quality factor (Q-factor) for detecting bio-reactions because liquid damping acts on only one-side, and because there is no obstacle between detection, excitation lasers and the cantilever. (Fig. 1 (c)) Using the cantilever integrated with a microchannel and phase locked loop detection, we measured adsorption reaction kinetics of carboxylated microspheres in real time for three different concentrations.
Keywords :
Q-factor; adsorption; bioMEMS; biosensors; cantilevers; damping; microchannel flow; microfabrication; microsensors; phase locked loops; reaction kinetics; Q-factor; adsorption reaction kinetics; bio-reactions; carboxylated microspheres; excitation lasers; liquid damping; microcantielver biosesor; microchannel; phase locked loop detection; quality factor; resonation; signal-to-noise ratio; Biosensors; Frequency measurement; Measurement by laser beam; Microchannel; Pumps; Resonant frequency; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734583