Title :
Polynomial expression for SAW reflection by aluminium gratings on 128°YX-LiNbO3
Author :
Ibata, Koji ; Omori, Tatsuya ; Hashimoto, Ken-Ya ; Yamaguchi, Masatsune
Author_Institution :
Graduate Sch. of Sci. & Technol., Chiba Univ., Japan
Abstract :
The paper deals with the derivation of simple polynomials characterising SAW reflection by metallic gratings with various widths and thicknesses. Such polynomial approximation makes it possible to estimate COM parameters in markedly reduced computational time. For very sophisticated SAW devices, this is of great use to develop high-speed simulation and design tools based on COM method. In the present study, it is shown how simply and accurately the SAW reflection by aluminium (Al) gratings on 128°YX-LiNbO3 substrates is characterised by polynomial approximation
Keywords :
acoustic wave reflection; aluminium; coupled mode analysis; lithium compounds; polynomial approximation; surface acoustic wave devices; Al; LiNbO3; LiNbO3 substrate; SAW reflection; aluminium metallic grating; coupling of modes method; design; numerical simulation; polynomial approximation; surface acoustic wave device; Aluminum; Computational modeling; Electrodes; Gratings; Metallization; Paper technology; Polynomials; Reflection; Reflectivity; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762127
