Title :
New piezoelectric KNbO3 films for SAW device applications
Author :
Yamanouchi, Kazuhiko ; Odagawa, Hiroyuki ; Kojima, Toshiyuki ; Cho, Yasuo
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
As-grown KNbO3 films deposited on STO (SrTiO3) substrates using MOCVD techniques are sufficiently piezoelectric for SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and λ/h=0.24 (λ: SAW wavelength, h: film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals
Keywords :
MOCVD coatings; piezoelectric materials; piezoelectric thin films; potassium compounds; surface acoustic wave devices; 960 MHz; KNbO3; MOCVD techniques; SAW device applications; SAW wavelength; SrTiO3; SrTiO3 substrates; center frequency; electromechanical coupling coefficients; film thickness; piezoelectric KNbO3 films; piezoelectric constants; single crystals; Crystals; Ferroelectric films; MOCVD; Metallization; Optical films; Optical surface waves; Piezoelectric films; Polarization; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762129
