Title :
A vertical micro-scale light guiding silicon dioxide tube array for optical neurostimulator
Author :
Sakata, M. ; Goryu, A. ; Ikedo, A. ; Harimoto, T. ; Ishida, M. ; Kawano, T.
Author_Institution :
Dept. of Electr. & Electron. Inf. Eng., Toyohashi Univ. of Technol., Toyohashi, Japan
Abstract :
In this paper, we present out-of-plane micro-scale diameter light guiding silicon dioxide tube arrays for use in optical stimulation of neurons. An optical propagation through the dioxide tube was calculated by using finite-difference time-domain (FDTD) simulation. Based on the calculated result, we designed and fabricated 3-μm-inner diameter 24-μm-height silicon dioxide tube arrays with the wall thickness of 0.5 μm, using selective vapor-liquid-solid (VLS) growth of silicon microwire, followed by microfabricating processes. The optical transmission capability of the fabricated tube was experimentally confirmed by using light of 470 nm, 525 nm, and 595 nm in wavelength.
Keywords :
bio-optics; finite difference time-domain analysis; light propagation; neurophysiology; optical waveguides; silicon compounds; SiO2; finite difference time domain simulation; optical neurostimulator; optical propagation; silicon dioxide tube array; silicon microwire; size 0.5 mum; size 24 mum; size 3 mum; vapor-liquid-solid growth; vertical micro-scale light guiding; Arrays; Electron tubes; Optical device fabrication; Optical fibers; Optical imaging; Silicon compounds;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734600
