DocumentCode :
2770386
Title :
5-inch-size contactless gripper using arrayed spiral air flows
Author :
Morimoto, K. ; Tada, Y. ; Takashima, H. ; Minamino, K. ; Tahara, R. ; Konishi, S.
Author_Institution :
Ritsumeikan Univ., Kusatsu, Japan
fYear :
2011
fDate :
23-27 Jan. 2011
Firstpage :
1063
Lastpage :
1066
Abstract :
We present a novel application of the MEMS technology to a contactless gripper using arrayed spiral air flows, aimed at the mitigation of flow-induced vibration of levitated objects. For robot end-effector dealing with fragile objects such as silicon wafers and solar panels, we employ an air flow-based gripping technique with continuous air-blowing, which would enable damage-free handling without contamination. We design the gripper based on the concept of distributed forcing with arrayed spiral-flow chambers and suction holes. In this paper, we show the basic characteristics of proof-of-concept devices, and extend our proposed concept to design and fabricate enlarged grippers in a size of 5 inch square. It is shown that the attraction force is successfully obtained by the negative pressure of a spiral flow in each chamber, and that suction holes play an important role in eliminating the interaction between the neighboring chambers and narrowing the holding gap so as to increase the force density over the entire object.
Keywords :
grippers; micromechanical devices; MEMS technology; air flow-based gripping technique; arrayed spiral air flows; contactless gripper; continuous air-blowing; damage-free handling; levitated object flow-induced vibration; robot end-effector; silicon wafers; size 5 inch; solar panels; Fabrication; Force; Grippers; Levitation; Silicon; Spirals; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
ISSN :
1084-6999
Print_ISBN :
978-1-4244-9632-7
Type :
conf
DOI :
10.1109/MEMSYS.2011.5734612
Filename :
5734612
Link To Document :
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