Title :
A single-stage micromachined vacuum pump achieving 164 torr absolute pressure
Author :
Zhou, H. ; Li, H.Q. ; Sharma, V. ; Schmidt, M.A.
Author_Institution :
Microsyst. Technol. Labs., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
We are developing a micromachined vacuum pump for portable analytical instruments that is comprised of a mechanical roughing pump integrated with a micro-machined ion pump. The focus of this paper is on the development of the roughing pump. We have fabricated two generations of micromachined displacement vacuum pumps to explore various design options. Through optimization of design and operation, we can now report a pump that achieves 164 torr absolute pressure, which is to our knowledge the lowest measured pressure in a micromachined vacuum pump operated from atmospheric pressure.
Keywords :
ion pumps; micromachining; micropumps; vacuum pumps; atmospheric pressure; displacement vacuum pumps; ion pump; mechanical roughing pump; micromachining; pressure 164 torr; single-stage vacuum pump; Actuators; Fabrication; Micromechanical devices; Micropumps; Pressure measurement; Valves;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734620
