Title :
An all-in-one nanoreactor for high-resolution microscopy on nanomaterials at high pressures
Author :
Creemer, J.F. ; Santagata, F. ; Morana, B. ; Mele, L. ; Alan, T. ; Iervolino, E. ; Pandraud, G. ; Sarro, P.M.
Author_Institution :
Delft Univ. of Technol., Delft, Netherlands
Abstract :
We present a new MEMS nanoreactor fully integrated on a single die. It enables atomic-scale imaging of nanostructured materials under the high pressures and temperatures that are typical for many industrial applications (14 bar and 660°C). The reactor can therefore be used to study the behavior of e.g. catalysts in a transmission electron microscope (TEM). It has a shallow channel (0.5 μm), which is made with surface micromachining techniques and contains pillars that prevent bulging. Integrated with the channel are very thin windows (15 nm) and a resistive heater. The reactor is very transparent, enabling the imaging of atomic lattice fringes with a spacing down to at least 0.15 nm.
Keywords :
micromachining; nanostructured materials; transmission electron microscopes; MEMS nanoreactor; TEM; all-in-one nanoreactor; atomic lattice fringes imaging; atomic-scale imaging; high-resolution microscopy; nanomaterials; nanostructured materials; pressure 14 bar; resistive heater; size 0.5 mum; size 15 nm; surface micromachining techniques; temperature 660 C; transmission electron microscope; Biomembranes; Heating; Inductors; Nanomaterials; Temperature measurement; Transmission electron microscopy;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734622