• DocumentCode
    2770730
  • Title

    Highly flexible, transparent and patternable parylene-C superhydrophobic films with high and low adhesion

  • Author

    Lu, Bo ; Lin, Jeffrey Chun-Hui ; Liu, Zhao ; Lee, Yi-Kuen ; Tai, Yu-Chong

  • Author_Institution
    California Inst. of Technol., Pasadena, CA, USA
  • fYear
    2011
  • fDate
    23-27 Jan. 2011
  • Firstpage
    1143
  • Lastpage
    1146
  • Abstract
    This paper reports the first parylene-C based superhydrophobic films with high or low adhesion for potential droplet-based microfluidics. By creating hierarchical dual-scale micro/nanostructures and applying various plasma treatments, both biomimetic designs of lotus leaf effect with high contact angle and low adhesion, and petal effect with high contact angle but high adhesion, are demonstrated. Due to parylene´s properties, these superhydrophobic films are highly flexible and transparent. Moreover, selective patterning of hydrophilic and superhydrophobic areas on a single film is also achieved. The combination of flexibility, transparency, selective patterning and simple fabrication makes our superhydrophobic films compare favorably to other designs.
  • Keywords
    adhesion; biomimetics; contact angle; hydrophilicity; hydrophobicity; microfluidics; adhesion; biomimetic design; contact angle; droplet-based microfluidics; dual-scale nanostructure; hierarchical dual-scale microstructure; hydrophilic area; lotus leaf effect; parylene-C superhydrophobic film; petal effect; plasma treatment; Adhesives; Films; Nanostructures; Plasmas; Rough surfaces; Surface roughness; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
  • Conference_Location
    Cancun
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-9632-7
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2011.5734632
  • Filename
    5734632