Title :
Highly flexible, transparent and patternable parylene-C superhydrophobic films with high and low adhesion
Author :
Lu, Bo ; Lin, Jeffrey Chun-Hui ; Liu, Zhao ; Lee, Yi-Kuen ; Tai, Yu-Chong
Author_Institution :
California Inst. of Technol., Pasadena, CA, USA
Abstract :
This paper reports the first parylene-C based superhydrophobic films with high or low adhesion for potential droplet-based microfluidics. By creating hierarchical dual-scale micro/nanostructures and applying various plasma treatments, both biomimetic designs of lotus leaf effect with high contact angle and low adhesion, and petal effect with high contact angle but high adhesion, are demonstrated. Due to parylene´s properties, these superhydrophobic films are highly flexible and transparent. Moreover, selective patterning of hydrophilic and superhydrophobic areas on a single film is also achieved. The combination of flexibility, transparency, selective patterning and simple fabrication makes our superhydrophobic films compare favorably to other designs.
Keywords :
adhesion; biomimetics; contact angle; hydrophilicity; hydrophobicity; microfluidics; adhesion; biomimetic design; contact angle; droplet-based microfluidics; dual-scale nanostructure; hierarchical dual-scale microstructure; hydrophilic area; lotus leaf effect; parylene-C superhydrophobic film; petal effect; plasma treatment; Adhesives; Films; Nanostructures; Plasmas; Rough surfaces; Surface roughness; Surface treatment;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734632