DocumentCode
2770730
Title
Highly flexible, transparent and patternable parylene-C superhydrophobic films with high and low adhesion
Author
Lu, Bo ; Lin, Jeffrey Chun-Hui ; Liu, Zhao ; Lee, Yi-Kuen ; Tai, Yu-Chong
Author_Institution
California Inst. of Technol., Pasadena, CA, USA
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
1143
Lastpage
1146
Abstract
This paper reports the first parylene-C based superhydrophobic films with high or low adhesion for potential droplet-based microfluidics. By creating hierarchical dual-scale micro/nanostructures and applying various plasma treatments, both biomimetic designs of lotus leaf effect with high contact angle and low adhesion, and petal effect with high contact angle but high adhesion, are demonstrated. Due to parylene´s properties, these superhydrophobic films are highly flexible and transparent. Moreover, selective patterning of hydrophilic and superhydrophobic areas on a single film is also achieved. The combination of flexibility, transparency, selective patterning and simple fabrication makes our superhydrophobic films compare favorably to other designs.
Keywords
adhesion; biomimetics; contact angle; hydrophilicity; hydrophobicity; microfluidics; adhesion; biomimetic design; contact angle; droplet-based microfluidics; dual-scale nanostructure; hierarchical dual-scale microstructure; hydrophilic area; lotus leaf effect; parylene-C superhydrophobic film; petal effect; plasma treatment; Adhesives; Films; Nanostructures; Plasmas; Rough surfaces; Surface roughness; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734632
Filename
5734632
Link To Document